MATS 254. Frontier Micro-Electro-Mechanical Systems (MEMS) Materials and Devices (4 units)
Link to catalog page: https://catalog.ucsd.edu/courses/MATS.html#mats254
Description
Fabrication of Micro-Electro-Mechanical Systems (MEMS) by bulk and surface micromachining of single crystal, polycrystal, and amorphous silicon and other materials. Performance issues including electrostatic, magnetic, piezoelectric actuations, residual stresses, deformation. Novel device applications, future trends in smart materials and nano-electro-mechanical (NEMS) systems. Prerequisites: consent of instructor. (Cross-listed with MAE 268.)
Prerequisite courses
MATS 254 has no prerequisite courses.
Successor courses
No courses have MATS 254 as a prerequisite.